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IT CORPORATION <br /> Client Sample ID: SL-MAINST.#19976/MW-5 <br /> GC/MS Volatiles <br /> Lot-Sample #_ _ _ : EOJ170165-003 Work Order #. . . : DM9WMIAE Matrix. _ . . . . : WAFER <br /> Date Sampled. . . : 10/12/00 12 15 Date Received. . : 10/17/00 10 00 MS Run #- - - - 0300056 <br /> Prep Date . - - : 10/20/00 Analysis Date . : 10/21/00 <br /> Prep Batch #. . : 0300172 Analysis Time . : 05 02 <br /> Dilution Factor: 10 <br /> Method. . . . . . . SW846 8260B <br /> REPORTING <br /> PARAMETER RESULT LIMIT UNITS <br /> Methyl Cert-butyl ether 470 10 ug/L <br /> 1,2-Dichloroethene ND 10 ug/L <br /> (total) <br /> 1,2-Dibromoethane ND 10 ug/L <br /> 1,2-Di-chloroethane ND 10 ug/L <br /> Tert-amyl methyl ether ND 20 ug/L <br /> Tert-butyl ethyl ether ND 20 ug/L <br /> t-Butanol ND 250 ug/L <br /> Isopropyl ether ND 20 ug/L <br /> PERCENT RECOVERY <br /> SURROGATE RECOVERY LIMITS <br /> Bromotluorobenzene 99 (75 - 120) <br /> 1,2-Dichloroethane-d4 101 (65 - 130) <br /> Toluene-d8 105 (60 - 130) <br /> 000014 <br />